ASML PAS 5500/300C DUV Wafer Stepper Training Video
ASML PAS 5500/300C DUV Wafer Stepper Training Video
Oct 15, 2020
cornell.edu
Grab your digital surfboards! 🏄 As we celebrate four decades of ASML, we're riding the waves of innovation that have changed our world forever. After the 80s popularized home computing, the 90s gave 'surfing' a new meaning as we ventured into the Internet era. It was during this time that ASML grew rapidly alongside our customers like AMD, Micron and TSMC. Together, we would go on to enable the innovations that connected home computers to the World Wide Web, transforming how we live, work and p
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【ASML EUV微影設備｜雙晶圓平台處理技術⚙️】 ASML TWINSCAN曝光機中的晶圓平台（Wafer Stage）是微影設備中關鍵的定位模組（Positioning Module），在系統設計上整合機械電子學、光學設計及量測學（包含量測、數據處理及控制）。雙晶圓平台能在同一時間移動兩片矽晶圓：其中右邊的晶圓曝光於EUV極紫外光下，將電路設計圖影像（Pattern）刻在晶圓上；左邊的晶圓同時由機台的量測儀器優化其準確度（Alignment）。兩個平台交替執行微影和量測功能，並以電磁的方式移動，在無摩擦力的作用下能加速至7G❗️ 這就是ASML的微影系統如何在晶片量產時得以兼顧準確性及生產速度的關鍵。⚡️ #ASML #EUV #WaferStage | ASML
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